High Efficiency High Accuracy Heater Driver

ABSTRACT

A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional under 35 U.S.C. §120 of U.S. patentapplication Ser. No. 14/013,151, filed Aug. 29, 2013, which is adivisional of U.S. patent application Ser. No. 12/708,648, filed Feb.19, 2010, the entire disclosures of which are hereby incorporated byreference herein.

FIELD

The present invention relates to a heater driver that can be used in arapid thermal process chamber to provide more efficient operation whenprocessing wafers.

BACKGROUND

Rapid thermal process (RTP) chambers need to control the power appliedto a lamps when processing semiconductor wafers to control the amount ofheat generated by the lamps. Current RTP chambers use a lamp drivercircuit that includes a phase angled controlled silicon controlledrectifier (SCR) to control the power applied to a lamp to control waferprocessing. These SCR based lamp driver circuits suffer from a number ofdrawbacks that limit the efficiency of wafer processing. One seriesdrawback of the SCR based approach is that the power factor of thecircuit is low. This is especially true at low power levels, where thepower factor can be less than 50%. This makes semiconductor processingenergy inefficient.

Additionally, the SCR based lamp driver circuit cannot be turned on nearthe points where voltage crosses zero. This is because an SCR requires aminimum voltage to be turned on. Therefore, the minimal value ofcontrolled output current has a threshold. This also contributes toprocessing inefficiencies.

Another problem is that, because of the nature of a SCR, it can only beswitched on and off two times per period. This is because the SCRswitches off only when the current through the device is zero. Highspeed, temperature processing would be improved if more accurate controlover a lamp driver circuit could be achieved.

Accordingly, in view of these drawbacks associated with SCR based lampdriver circuits in RTP chambers, new and improved lamp driver circuitsare needed

SUMMARY

One aspect of the present invention provides a rapid thermal processchamber that processes a wafer. The rapid thermal process chamber issupplied with AC power and can include a plurality of halogen lamps, alamp driver, a temperature sensor that measures wafer temperature; and atemperature controller connected to the temperature sensor and to thelamp driver, the temperature controller providing a control signal as afunction of the wafer temperature and a desired temperature to a controlinput of the first transistor and to a control input of the secondtransistor. The lamp driver comprises a first diode having a cathodeconnected to a first terminal of a first transistor in parallel with asecond diode having a cathode connected to a first terminal of a secondtransistor, wherein an anode of the first diode and a second terminal ofthe second transistor is connected to one or more of the plurality ofhalogen lamps and an anode of the second diode and a second terminal ofthe first transistor is connected to the AC power supply.

In accordance with another aspect of the present invention, a rapidthermal process chamber that processes a wafer comprises a plurality ofhalogen lamps, a power source comprising an AC power source with a firstswitch and a second switch, the power source connected to the pluralityof halogen lamps to supply power to the plurality of halogen lamps, atemperature sensor that measures a temperature of the wafer, and atemperature controller connected to the temperature sensor and to thefirst switch and the second switch in the power source, the temperaturecontroller providing a first control signal to the first switch and asecond control sign to the second switch, the first control signal andthe second control signal being a function of the wafer temperature anda desired temperature. The first control signal turns the first switchon and off a plurality of times per half cycle of the AC power and thesecond control signal turns the second switch on and off a plurality oftimes per half cycle of the AC power.

In accordance with another aspect of the present invention, the firstswitch is turned on while the second switch is turned off. Also, thefirst switch is turned off while the second switch is turned on.

In accordance with another aspect of the present invention, thetemperature controller forms the first control signal and the secondcontrol signals as pulsed versions of the AC power.

In accordance with another aspect of the present invention, the powerfactor of the power supplied to the plurality of halogen lamps isapproximately 1. In general the power factor is between 0.9 and 1.

In accordance with another aspect of the present invention, the firstswitch and the second switch are transistors. The transistors can beMOSFET transistors, bipolar transistors or insulated gate bipolartransistors.

In accordance with another aspect of the present invention, a method ofcontrolling a rapid thermal process chamber that processes a wafer isprovided. The method includes the steps of sensing a temperature of thewafer, determining a desired temperature, a temperature controllergenerating a first control signal and a second control signal inaccordance with the temperature of the wafer and the desiredtemperature, the first control signal turning a first switch on and offa plurality of times per half cycle of AC power supplied to thetemperature controller, the second control signal turning a secondswitch on and off a plurality of times per half cycle of AC powersupplied to the temperature controller and the first and second switchsupplying power to a plurality of halogen lamps.

In accordance with another aspect of the present invention, the firstswitch and the second switch are turned on at different times. The firstswitch is turned on while the second switch is turned off and the firstswitch is turned off while the second switch is turned on.

In accordance with another aspect of the present invention, thetemperature controller forms the first control signal and the secondcontrol signals as pulsed versions of the AC power.

In accordance with another aspect of the present invention, the powerfactor of the power supplied to the plurality of halogen lamps isapproximately 1.

As before, the first switch and the second switch can be transistors.The transistors can be selected from the group consisting of MOSFETtransistors, bipolar transistors and insulated gate bipolar transistors.

In another aspect of the present invention, a rapid thermal processchamber that processes a wafer, the rapid thermal process chamber beingsupplied with AC power, comprises a plurality of halogen lamps, a lampdriver comprising a parallel connection of a first diode and a firsttransistor with a second diode and a second transistor, the lamp driverbeing connected to a source of AC power and to the plurality of halogenlamps to supply power to the plurality of halogen lamps, a temperaturesensor that measures a wafer temperature and a temperature controllerconnected to the temperature sensor and to the lamp driver, thetemperature controller providing a first control signal as a function ofthe wafer temperature and a desired temperature to the first transistorand a second control signal as a function of the wafer temperature andthe desired temperature to the second transistor. The first transistoris turned on at different times than the second transistor.

The transistors can both be MOSFETS, can both be bipolar transistors orcan both be insulated gate bipolar transistors. As be fore, the firstand second transistors can be turned on and off two or more times perhalf period of AC voltage supplied. The power factor of the powersupplied to the plurality of halogen lamps is between 0.9 and 1.

DRAWINGS

FIG. 1 illustrates a Rapid Thermal Process chamber having halogen lamps,lamp drivers, a wafer temperature controller, a temperature sensor and atemperature controller.

FIG. 2 illustrates a lamp driver in accordance with one aspect of thepresent invention.

FIG. 3 illustrates voltage from a power source and a driver outputvoltage in accordance with an aspect of the present invention.

FIG. 4 illustrates a driver circuit in accordance with an aspect of thepresent invention.

FIG. 5 illustrates waveforms associated with the circuit of the presentinvention in accordance with an aspect of the invention.

FIG. 6 illustrates an operation of the present invention in accordancewith one aspect of the invention.

DESCRIPTION

FIG. 1 illustrates a Rapid Thermal Process (RTP) chamber 10. The RTPchamber 10 includes several groups of halogen lamps 12, several lampdrivers 14 and a wafer 16 being processed. The lamp drivers 14 areconnected to the halogen lamps 12 and control the power supplied to thehalogen lamps 12. The halogen lamps 12 provide heat to the wafer 16 thatallow the wafer 16 to be processed in known fashions.

A wafer temperature controller 18 has an input connected to atemperature sensor 20 and an output connected to the lamp drivers 14.The temperature sensor 20 is a noncontact temperature sensor inaccordance with one aspect of the present invention, and it measures thetemperature of the wafer 16. The temperature is provided from thetemperature sensor 20 to the temperature controller 18. A requiredtemperature for the wafer 16 is also provided to the temperaturecontroller 18. The temperature controller 18 sends a control signalbased on the measured and required temperature, to the lamp drivers 14to control the halogen lamps 12. The lamp drivers 14 maintain therequired lamp power at the halogen lamps 12 which generates infraredemission to heat the wafer 16.

One prior art lamp driver 14 is shown in FIG. 2. The lamp driver 14 isconnected to a power source 30. The power source 30 can be a powerdistribution line. The lamp driver 14 consists of a power controlelement. In the prior art, for example, a bipolar silicon controlledrectifier (SCR) 34 with a SCR controller 36 is provided. Initially, SCRdoes not conduct current. Based on external command from controller 18,SCR controller 36 turns the SCR 34 on and off, causing current to flowthrough the lamp 12. The SCR 34 stops conducting, and the lamp 12 turnsoff, when the polarity of the control signal provided to the SCR 34 isreversed.

FIG. 3 shows voltage 40 from power source 30 on the left. When a SCR 34is used, the driver output voltage 42 from the SCR 34 is shown on theright. Of interest, the SCR 34 is typically turned on and off once perhalf of the AC cycle of the power source 30.

FIG. 4 illustrates the lamp driver in accordance with one aspect of thepresent invention. The lamp driver has an electronic switch 46 and acontroller 48. The electronic switch 44, in accordance with one aspectof the present invention, includes a first transistor 50, a secondtransistor 52, a first diode 54 and a second diode 56. As illustrated inFIG. 4, the first diode 54 has a cathode connected to a first terminalof the first transistor 50. The second diode 56 has a cathode connectedto a first terminal of the second transistor 52. The series connectionof the first diode 54 and the first transistor 50 is connected inparallel to the series connection of the second diode 56 and the secondtransistor 52.

An anode of the first diode 54 and a second terminal of the secondtransistor 52 is connected to one or more of the plurality of halogenlamps 12. An anode of the second diode 56 and a second terminal of thefirst transistor 50 is connected to an AC power supply.

The transistors 50 and 52 can be implemented with most types oftransistors. For example, the transistors 50 and 52 can be implementedwith MOSFET transistors in accordance with one aspect of the presentinvention. The transistors 50 and 52 can also be implemented withbipolar transistors in accordance with other aspects of the presentinvention. Further, the transistors 50 and 52 can be implemented withinsulated gate bipolar transistors (IGBT). In FIG. 4, the transistors 50and 52 are shown as MOSFET transistors. The diode 56 and the transistor52 conduct during the positive portion of an input sine wave. The diode54 and the transistor 50 conduct during the negative portion of an inputsine wave.

Referring to FIG. 4, a controller 48 receives commands from thetemperature controller 18. The temperature controller 18 receives adesired temperature as well as the sensed temperature from thetemperature sensor 20. The controller 48 analyzes the sensed temperatureand the desired temperature and issues control signals to the controlinput of the transistors 50 and 52 that turn the transistors 50 and 52on and off to maintain a desired voltage across the lamps 12 so that adesired temperature is maintained.

As illustrated in FIG. 5, the controller 48 is capable of turning thetransistors 50 and 52 on and off several times per half period of inputAC voltage. It accomplishes this by chopping a sine wave form of inputvoltage 60 into a pulsed voltage 62. The temperature controller 18 cantherefore precisely adjust the voltage across the lamp 12 during periodof input AC voltage by turning the transistors 50 and 52 on and off twoor more times per period of the input AC voltage supply.

FIG. 6 illustrates a lamp heater circuit that includes two drivercircuits 90 and 92 in accordance with an aspect of the presentinvention. Each of the driver circuits 90 and 92 control a group of oneor more lamps. In accordance with another aspect of the presentinvention, a controller 94 staggers the switching phase of drivers 90 tospread the conductive phase during period of AC voltage. Output voltages96 and 98 are shown for 50% duty cycle. In a case of active load, suchas resistors or lamps, the input currents 99 and 100 have the same formas output voltages 96 and 98. Input heater current 27 is a superpositionof output currents of multiple drivers. Hence, input current is asuperposition of output currents of multiple drivers. For the givenexample, the resulting form of input current is sinusoidal. The heaterinput voltage 26 and input current 27 do not have a phase shift betweeneach other and the power factor is approximately 1.

The lamp driver of the present invention can be controlled much quickerthan previous lamp circuits that utilized silicon controlled rectifiers.This is because the transistors can be turned on and off much quickerthan SCRs, which have a slow response time. Thus, far more accuratecontrol of the halogen lamps 12 is possible using the present invention.

A method of controlling a rapid thermal process chamber that processes awafer is also provided. The rapid thermal process chamber is suppliedwith AC power and, as already described, has a plurality of halogenlamps whose power output is controlled by lamp drivers. As described,the lamp driver includes a first diode having a cathode connected to afirst terminal of a first transistor in parallel with a second diodehaving a cathode connected to a first terminal of a second transistor,wherein an anode of the first diode and a second terminal of the secondtransistor is connected to one or more of the plurality of halogen lampsand an anode of the second diode and a second terminal of the firsttransistor is connected to the AC power supply.

The process in accordance with one aspect of the present invention,includes sensing a temperature of the wafer with a temperature sensor,transmitting the sensed wafer temperature and a required temperature toa temperature controller, the temperature controller generating acontrol signal that is sent to a control input of a first transistor andto a control input of a second transistor to turn the first transistorand the second transistor on and off and supplying a signal to theplurality of halogen lamps to control the heat emitted.

Where the first and second transistors in each of the lamp drivers areboth a MOSFET, the control input of the first and second transistors isthe MOSFET gate. Where bipolar transistors are used, the control inputof the first and second transistors is a base terminal.

In accordance with another aspect of the present invention, thetemperature controller chops the AC voltage supplied to create controlsignals for the first and second transistors that turn the first andsecond transistors on and off two or more times per half period of ACvoltage supplied.

The driver circuit of the present inventions gives three benefits: Itallows faster setting time of output voltage allows better dynamicaccuracy of the process temperature control. The driver according toembodiments of the present invention has maximal achievable speedbecause it works in the open loop mode. Open loop mode eliminates allnegative effects related to an internal closed loop: increasing settlingtime and overshooting. Static error of the driver is compensated byexternal wafer temperature control closed loop.

It also allows increased accuracy of the process temperature control atlow temperature: Unlike commonly used SCR based driver that utilizesphase angle control method, this driver, for all practical purposes,does not have minimum output voltage whereas the minimal controllableoutput voltage of prior art SCR based drivers is 5%. Additionally thedriver of embodiments of the present invention has better accuracy atlow output voltage. Accordingly, the new driver has better power factorand therefore lower energy cost at medium and low power range. This isan advantage because the average power during a rapid thermal processingis in a range of 27%-35%. The typical power factor of prior RapidThermal Process systems using the SCR drivers is 0.4. The new driver haspower factor better than 0.9 at any controlled power level. In mostcases, the power factor is nearly 1.

While there have been shown, described and pointed out fundamental novelfeatures of the invention as applied to preferred embodiments thereof,it will be understood that various omissions and substitutions andchanges in the form and details of the device illustrated and in itsoperation may be made by those skilled in the art without departing fromthe spirit of the invention. It is the intention, therefore, to belimited only as indicated by the scope of the claims appended hereto.

We claim:
 1. A method of controlling a thermal process chamber thatprocesses a wafer, comprising: sensing a temperature of the wafer;determining a desired temperature; and generating a first control signaland a second control signal with a temperature controller in accordancewith the temperature of the wafer and the desired temperature, the firstcontrol signal turning a first switch on and off a plurality of timesper half cycle of AC power supplied to the temperature controller, thesecond control signal turning a second switch on and off a plurality oftimes per half cycle of AC power supplied to the temperature controller,and the first and second switch supplying power to a plurality ofhalogen lamps.
 2. The method of claim 1, wherein the first switch andthe second switch are turned on at different times.
 3. The method ofclaim 1, wherein the first switch is turned on while the second switchis turned off.
 4. The method of claim 3, wherein the first switch isturned off while the second switch is turned on.
 5. The method of claim4, wherein the first control signal and the second control signals arepulsed versions of the AC power.
 6. The method of claim 5, wherein apower factor of the power supplied to the plurality of halogen lamps isbetween 0.9 and
 1. 7. The method of claim 6, wherein the first switchand the second switch are transistors.
 8. The method of claim 5, whereinthe first switch and the second switch are selected from the groupconsisting of MOSFET transistors, bipolar transistors and insulated gatebipolar transistors.
 9. The method of claim 1, wherein the first switchand the second switch are zones of halogen lamps.